We have built a
microscopic model
of Frank Lloyd Wright's Fallingwater
using a silicon micromachining process that has been developed
to create a variety of
Micro Electro Mechanical Structures (MEMS).
We have built a
microscopic model
of Frank Lloyd Wright's Fallingwater
using a silicon micromachining process that has been developed
to create a variety of
Micro Electro Mechanical Structures (MEMS).
The Fabrication Process:
The design of these tiny structures has to obey
strict rules.
It is drawn on a computer aided design (CAD) system,
referring to copies of the blueprints from Frank Lloyd Wright.
The CAD design is then automatically decomposed into a sequence of rectangles,
which allows the generation of patterns on lithography masks.
Once the lithography masks are finished, the micro Fallingwater structures
are fabricated on a silicon wafer in a
sequence of lithography,
deposition, and etching steps.
Back to the Invisible Cantilever.
We thank Bruce Donald and Noel MacDonald for their creative advice and support. Thanks also to staff and students at the Cornell Nanofabrication Facility.